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Professor Jiann Shieh

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Professor Jiann Shieh

Personal information

Profession: Nanofabrication and Semiconductor Process

Email: jshieh@nuu.edu.tw

Personal Website: http://jiann.weebly.com

Education

Ph.D., Materials Science & Engineering, National Cheng Kung University, 1997/09~2002/06

Master, Materials Science & Engineering, National Cheng Kung University, 1995/09~1997/06

Bachelor, Materials Science & Engineering, National Cheng Kung University, 1991/09~1995/06

Work experience

Professor, National United University, 2015/7~

Chair, Department of Materials Science and Engineering, 2015/8~2018/7

Associate Professor, National United University, 2010/8~2015/7

Associate Researcher, National Nano Device Laboratory, 2002/10~2010/7

Manager of Nano CMOS Device Platform, National Nano Device Laboratory

Manager of Nanofabrication/Device Technology, National Nano Device Laboratory

PI of Nanofabrication and Functional Materials, National Nano Device Laboratory

Manager of Core Facility, National Nano Device Laboratory

Visiting Scientist, CSIRO, Lindfield, Australia

Awards

NDL Best paper award (2007)

Invited Scientist by CSIRO, Australia (2010)

NUU Outstanding research award (2011, 2015)

TVS poster award (2012)

MRS-T poster award (2013)

TACT poster award (2015)

Project for Excellent Junior Research Investigators, National Science Council (2012-2015)

Project for Excellent Junior Research Investigators, Ministry of Science and Technology (2015-2018)

Research

We are dedicated to pioneering nanotechnology research, such as the robust superhydrophobic surfaces, the ultrablack surface layer with submicron thickness, the nanostructured solar cells, the highly transparent and superwetting glass, and the unsinkable self-jumping metals. Currently, we are interested in oil/water separation, attomolar sensing and fantastic surface phenomena.

Teaching

General Chemistry, Materials Science and Engineering, Semiconductor Process, Nanomaterials, Advanced Materials

Journal paper

 

Jing Yuan Tsai, Guan Fu Huang, Jiann Shieh\*, Chin Chi Hsu, Kostya (Ken) Ostrikov, "Harvesting Water Surface Energy: Self-Jumping Nanostructured Hydrophobic Metals" iScience 24, 102746 (2021). Featured in New Scientists (3 July 2021)

 

Tsung-Shine Ko, Han-Yuan Liu, Jiann Shieh, De Shieh, Szu-Hung Chen, Yen-Lun Chen, En-Ting Lin, "Using Si/MoS2 Core-Shell Nanopillar Arrays Enhances SERS Signal" Nanomaterials 11, 733 (2021).

 

Chun-Hui Wu, You An Lee, Yen Jung Lai, Jiann Shieh, Chii Rong Yang, Chin-Chi Hsu, "Heat transfer enhancement of a multilayer graphene coating surface" Experimental Thermal and Fluid Science 118, 110175 (2020).

 

Hong-Yi Lee, Bo-Wen Huang, Yi Ci Tsai, Jiann Shieh\*, "Rapid, Low-Temperature Growth of Sub-10 nm Silica Nanowires through Plasma Pretreatment for Antireflection Applications" ACS Applied Nano Materials 2, 2836-2843 (2019).

 

Yi Ci Tsai, Jiann Shieh\*, "Growing invisible silica nanowires on fused silica plates provides highly transparent and superwetting substrates" Applied Surface Science 479, 619-625 (2019).

 

Jiann Shieh\*, Cheng Yun You, Chia Chen Chiu, Jian Ming Liu, Ping Yu Shih, "Black-Silicon on Micropillars with Minimal Surface Area Enlargement to Enhance the Performance of Silicon Solar Cells" Nanoscale Research Letters 11, 489 (2016).

 

J. Shieh\*, Y. C. Li, C. Y. Ji, C. C. Chiu, H. Y. Lin, " Extracting high electrical currents with large fill factors from core/shell silicon nanopillar solar cells" Journal of Renewable and Sustainable Energy 7, 033102 (2015). (most-accessed articles from JRSE published from April − June 2015)

 

C.C. Liang, C.H. Lin\*, T.C. Cheng, J. Shieh, H.H. Lin, “Nanoimprinting of Flexible Polycarbonate Sheets with a Flexible Polymer Mold and Application to Superhydrophobic Surfaces,” Advanced Materials Interfaces 2, 1500030 (2015). (Back Cover)

 

Shu Ning Wen and Jiann Shieh\*, "Fabricating Silver Nanoparticles on Thin Silicon Nanowalls for Highly Sensitive Surface-Enhanced Raman Scattering" Materials Transactions, 55, 1800-1805 (2014).

 

Yuan-Ming Chang, Srikanth Ravipati, Pin-Hsu Kao, Jiann Shieh, Fu-Hsiang Ko, and Jenh-Yih Juang, "Broadband antireflection and field emission properties in TiN-coated Si nanopillars" Nanoscale 6, 9846-9851 (2014).

 

Chi-Ching Liu, Shien-Uang Jen, Jiann Shieh, Jenh-Yih Juang, Yuan-Ming Chang, Han-Hsiang Chian and Huang-Wei Chang, "Magnetic Properties of Fe55Pd45 Films Deposited on Si (100) Nano-meter Wide Pillars" Journal of Nanomedicine & Nanotechnology S5: 006 (2014).

 

C. H. Lin, J. Shieh\*, C. C. Liang, C. C. Cheng and Y. C. Chen, "Decreasing reflection through the mutually positive effects of nanograss and nanopillars", J. Materials Chemistry C 2, 3645-3650 (2014).

 

Ding-Liang Chiang, Min-Hsiung Hon, Lay Gaik Teoh, Jiann Shieh\*, "Microstructure and Photoluminescence of Ge-doped Mesoporous Silica", Journal of Sol-Gel Science and Technology 66, 242-247 (2013).

 

Kuan-Liang Lin, Tuo-Hung Hou, Yao-Jen Lee, Jhe-Wei Chang, Jun-Hung Lin, Jiann Shieh, Cheng-Tung Chou, Tan-Fu Lei, Wen-Hsiung Chang, Wen-Yueh Jang, "Switching Mode and Mechanism in Binary Oxide RRAM Using Ni Electrode" Japanese Journal of Applied Physics 52, 031801 (2013).

 

Srikanth Ravipati, Jiann Shieh*, Fu-Hsiang Ko*, Chen-Chieh Yu, Hsuen-Li Chen, “Ultralow reflection from a-Si nanograss/Si nanofrustum double layers" Advanced Materials 25, 1724-1728 (2013).

 

Srikanth Ravipati, Jiann Shieh*, Fu-Hsiang Ko*, Chen-Chieh Yu, Hsuen-Li Chen, Chia-Tien Wu and Szu-Hung Chen, 2012/4 “Broadband and wide angle antireflection of sub-20 nm GaAs nanograss” Energy & Environmental Science 5, 7601-7605 (2012).

 

Chien-Chong Hong, Sheng-Yuan Huang, Jiann Shieh, and Szu-Hung Chen, “Enhanced Piezoelectricity of Nanoimprinted Sub-20 nm Poly(vinylidene fluoride−trifluoroethylene) Copolymer Nanograss” Macromolecules 45, 1580-1586 (2012).

 

S. Kumar, I. Levchenko, Q. J. Cheng, J. Shieh, and K. Ostrikov, “Plasma enables edge-to-center-oriented graphene nanoarrays on Si nanograss” Applied Physics Letters 100, 053115 (2012).

 

Yuan-Ming Chang, Jiann Shieh, Pei-Yuan Chu, Hsin-Yi Lee, Chih-Ming Lin, and J. Y. Juang, "Enhanced Free Exciton and Direct Band-Edge Emissions at Room-Temperature in Ultrathin ZnO Films Grown on Si-Nanopillars by Atomic Layer Deposition" ACS Applied Materials & Interfaces 3, 4415-4419 (2011).

 

Pai-Yen Chen, Tsung-Chieh Cheng, Jiann Shieh, Yun-Cin Luo, “Nanomanipulation of field emission measurement for vacuum nanodiodes based on uniform silicon nanowire emitters” Applied Physics Letters 98, 163106 (2011).

 

Y. M. Chang, J. Shieh, J. Y. Juang, “Sub-Wavelength Antireflective Si Nanostructures Fabricated by Using the Self-Assembled Silver Metal-Nanomask” J. of Physical Chemistry C 115, 8983-8987 (2011)

 

Kuan-Liang Lin, Tuo-Hung Hou, Jiann Shieh, Jun-Hung Lin, Cheng-Tung Chou, Yao-Jen Lee, ”Electrode Dependence of Filament Formation in HfO2 Resistive-Switching Memory” J. Applied Physics 109, 084104 (2011).

 

Tuo-Hung Hou, Kuan-Liang Lin, Jiann Shieh, Jun-Hung Lin, Cheng-Tung Chou, Yao-Jen Lee, 2011/3 “Evolution of RESET Current and Filament Morphology in Low-Power HfO2 Unipolar Resistive Switching Memory” Applied Physics Letters 98, 103511 (2011)

 

Chun-Hung Lin, Chi-Hao Fong, Yi-Ming Lin, Yin-Yu Lee, Hok-Sum Fung, Bor-Yuan Shew, Jiann Shieh, “EUV interferometric lithography and structural characterization of an EUV diffraction grating with nondestructive spectroscopic ellipsometry“ Microelectronic Engineering 88, 2639-2643 (2011).

 

(invited) Jiann Shieh\*, Srikanth Ravipati, Fu Hsiang Ko, Kostya (Ken) Ostrikov, 2011 “Plasma-made silicon nanograss and related nanostructures” J. Phys. D: Applied Physics 44, 174010 (2011).

 

Ding Liang Chiang, Min Hsiung Hon, Lay Gaik Teoh, Jiann Shieh\*, Bing Ming Cheng, Hsiao Chi Lu, Hsu Chun Cheng, “Eliminated UV Light Emitted from Nanostuctured Silica Thin Film using H2 Plasma by ICP-CVD” Current Nanoscience 7, 240-244 (2011).

 

Srikanth Ravipati, Chang-Jung Kuo, Jiann Shieh*, Cheng-Tung Chou, Fu-Hsiang Ko*, “Fabrication and Enhanced Field Emission Properties of Novel Silicon Nanostructures” Microelectronics Reliability 50, 1973-1976 (2010).

 

Chien-Chong Hong, Pin Huang, Jiann Shieh, “Fabrication of Morphology-Controlled Sub-20 nm Polymer Nanotip and Nanopore Arrays Using the Identical Nanograss Mold”, Macromolecules 43, 7772-7778 (2010). (Highlighted by Nature Asia Materials)

 

Shang-Yu Chuang, Hsuen-Li Chen*, Jiann Shieh*, Chun-Hung Lin, Chao-Chia Cheng, Hao-Wei Liu, Chen-Chieh Yu, "Nanoscale of biomimetic moth eye structures exhibiting inverse polarization phenomena at the Brewster angle" Nanoscale 2, 799-805 (2010).

 

Jiann Shieh\*, Fu Ju Hou, Yan Chen Chen, Hung Min Chen, Shun Po Yang, Chao Chia Cheng, Hsuen Li Chen, “Robust airlike superhydrophobic surfaces” Advanced Materials 22, 597-601 (2010).

 

D. H. Wan, H. L. Chen, Y. S. Lin, S. Y. Chuang, J. Shieh, S. H. Chen, "Using spectroscopic ellipsometry to characterize and apply the optical constants of hollow gold nanoparticles" ACS Nano 3, 960-970 (2009).

 

W. H. Lai, M. H. Hon, L. G. Teoh, Y. H. Su, J. Shieh, C. K. Chen, “Field-Emission Performance of Wormhole-Like Mesoporous Tungsten Oxide Nanowires” J. of Electronic Materials 37, 1082-1087 (2008).

 

K. C. Hsieh, Hsuen-Li Chen, D. H. Wan, J. Shieh, "Active modulation of surface plasmon resonance wavelengths by applying an electric field to gold nanoparticle-embedded ferroelectric films" J. of Physical Chemistry C 112, 11673-11678 (2008).

 

T. S. Ko, J. Shieh, M. C. Yang, T. C. Lu, H. C. Kuo, S. C. Wang, “Phase transformation and optical characteristics of porous germanium thin film” Thin Solid Films 516, 2934-2938 (2008).

 

Wei Hao Lai, Lay Gaik Teoh, Yen Hsun Su, Jiann Shieh, and Min Hsiung Hon, “Effect of Calcination on Crystallinity for Nanostructured Development of Wormhole-Like Mesoporous Tungsten Oxide”, J. the American Ceramic Society 90, 4073-4075 (2007).

 

W.H. Lai, L.G. Teoh, Y.H. Su, J. Shieh, M.H. Hon, ”Hydrolysis reaction on the characterization of wormhole-like mesoporous tungsten oxide” Journal of Alloys and Compounds 438, 247-252 (2007).

 

(invited) J. Shieh\*, C. H. Lin, M. C. Yang, “Plasma Nanofabrications and Antireflection Applications” J. Phys. D: Applied Physics 40, 2242-2246 (2007).

 

T. C. Cheng, J. Shieh, W. J. Huang, M. C. Yang, M. H. Cheng, H. M. Lin, and M. N. Chang, “Hydrogen plasma dry etching method for field emission application” Appl. Phys. Lett. 88, 263118 (2006).

 

Wei Hao Lai, Jiann Shieh, Lay Gaik Teoh, Min Hsiung Hon, “Fabrication of one-dimensional mesoporous tungsten oxide” Nanotechnology 17, 110 (2006).

 

Ming-Che Yang, Jiann Shieh\*, Chiung-Chih Hsu, Tsung-Chieh Cheng, “Well-aligned Silicon Nanograss Fabricated by Hydrogen Plasma Dry Etching”, Electrochem. Solid-State Lett. 8, C131-133 (2005).

 

Ming-Che Yang, Jiann Shieh\*, Tsung-Shine Ko, Hsuen-Li Chen, and Tieh-Chi Chu, “Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS mechanism”, Jap. J. Appl. Phys. 44, 5791-5794 (2005).

 

An-Thung Cho, Jia-Min Shieh, Jiann Shieh, Yi-Fan Lai, Bau-Tong Dai, Fu-Ming Pan, Hao-Chung Kuo, Yong-Chang Lin, Kuei-Jung Chao, and Pang-Hung Liu, 2005/6, “Emission of Bright Blue Light from Mesoporous Silica with Dense Si (Ge) Nanocrystals”, Electrochem. Solid-State Lett. 8, G143-146 (2005).

 

Ming-Jui Yang, Jiann Shieh, Shih-Lu Hsu, Ing-Jye Huang, Ching-Chich Leu, Shih-Wen Shen, Tiao-Yuan Huang, Peer Lehnen, and Chao-Hsin Chien, “Low-Temperature Growth of Polycrystalline Ge Films on SiO2 Substrate by HDPCVD”, Electrochem. Solid-State Lett. 8, C74-76 (2005).

 

W. H. Lai, J. Shieh, L. G. Teoh, I. M. Hung, C. S. Liao, M. H. Hon, ”Effect of copolymer and additive concentrations on the behaviors of mesoporous tungsten oxide”, J of Alloys and Compounds 396, 295-301 (2005).

 

L. G. Teoh, J. Shieh, W. H. Lai, I. M. Hung, M. H. Hon, “Structure and Optical Properties of Mesoporous Tungsten Oxide”, J of Alloys and Compounds 396, 251-254 (2005).

 

J. Shieh\* and M.H. Hon, “Observation of plastic deformation in TiAlCN/a-C ceramic nanocomposite coating”, Applied Physics A 80, 131-134 (2005).

 

Jiann Shieh\*, Tsung Shine Ko, Hsuen Li Chen, Bau Tong Dai, and Tieh Chi Chu, “Low-temperature growth of germanium quantum dots on silicon oxide by inductively coupled plasma chemical vapor deposition”, Chemical Vapor Deposition 10, 265-269 (2004).

 

Lay Gaik Teoh, Jiann Shieh, Wei Hao Lai, Min Hsiung Hon, “Effects of Mesoporous Structure on Grain Growth of Nanostructured Tungsten Oxide”, J. Materials Research 19, 2687-2693 (2004).

 

Jiann Shieh\*, Hsuen Li Chen, Tsung Shine Ko, Hsu Chun Cheng, and Tieh Chi Chu, “Nanoparticle-Assisted Growth of Porous Germanium Thin Film”, Advanced Materials 16, 1121-1124 (2004).

 

L.G. Teoh, I.M. Hung, J. Shieh, W.H. Lai, and M.H. Hon, “Sensitivity properties of a novel NO2 gas sensor based on mesoporous WO3 thin film”, Sensors and Actuators B 96, 219-225 (2003).

 

L.G. Teoh, I.M. Hung, J. Shieh, W.H. Lai, and M.H. Hon, “High Sensitivity Semiconductor NO2 Gas Sensor Based on Mesoporous WO3 Thin Film” Electrochem. Solid-State Lett. 6, G108-111.

 

J. Shieh, H. M. Feng, M. H. Hon, and H. Y. Juang, “WO3 and W-Ti-O thin-film gas sensors prepared by sol-gel dip-coating”, Sensors and Actuators B 86, 75-80 (2002).

 

Jiann Shieh, Hsiao Lei Wang, Ming Shyong Tsai, and Min Hsiung Hon, “Effects of Coffee-bean-like Morphology and Graded Interlayer on Texture Evolution of PECVD-deposited Titanium Carbonitride Films”, J. the American Ceramic Society 85, 636-640 (2002).

 

Jiann Shieh and Min Hsiung Hon, “Plasma enhanced chemical vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films”, J. Vacuum Science Technology A 20, 87-92 (2002).

 

J. Shieh and M. H. Hon, “Nanostructure and hardness of titanium aluminum nitride prepared by plasma enhanced chemical vapor deposition”, Thin Solid Films 391, 101-108 (2001)..

Conference paper

Invited talk

Jiann Shieh “Antireflective nanostructure for the application of silicon solar cells”, IUMRS International Conference in Asia (IUMRS-ICA), Taipei, Nov. 5-7, 2017.

 

Jiann Shieh "Plasma applications on surface antireflection", International Conference on Plasma Science and Applications, Singapore, Dec. 4-6, 2013.

 

Jiann Shieh, Srikanth Ravipati, Fu-Hsiang Ko, “Applications and formation mechanism of nanograss”, iPlasma Nano-III, Desaru, Malysia, Feb. 27-March 1, 2012. (oral/invited)

 

Jiann Shieh, “Fabricating Substrate-Bonded One-Dimensional Nanostructures by Environment-Friendly Hydrogen Plasma Etching”, IUPAC-NMS VII, Shanghai, Oct. 16-21, 2011. (oral/invited)

 

Jiann Shieh, “Silicon-based nanostructures prepared by hydrogen plasma etching”, 2011 AVS International Plasma Workshop, Taipei, Taiwan, March 22-25, 2011. (oral/invited)

 

Jiann Shieh, “Recent developments in plasma made nanograss”, iPlasma Nano-II, Murramarang Resort, New South Wales, Australia, December 12-15, 2010. (oral/invited)

 

Jiann Shieh, “Resistive Switching of Hafnium Oxide”, Joint Workshop on Nano-Process and Nano-Device, April 23-24, 2010, Sendai, Japan..(oral/invited)

 

Jiann Shieh, “Fabrications and Applications of Silicon Nanograss”, The third international OCE science leader workshop on plasma nanoscience and nanotechnology, CSIRO, Lindfield, Australia, March 23, 2010. (oral/invited)

 

International Conference

Jiann Shieh, “Hairy materials with superior surface area, light trapping and wetting properties “, 2019 International Conference on Graphene and Novel Nanomaterials (GNN 2019), Thailand, July 8-11, 2019.

 

Hong Yi Lee, Yi Cheng Huang, Yi Ci Tsai, Jiann Shieh\* (2018, Sep). Capturing PM2.5 by silica nanowires grown on metal mesh. MNE 2018 (44th International Conference on Micro & Nano Engineering), Copenhagen, Denmark.

 

Yi Cheng Huang, Hong Yi Lee, Yi Ci Tsai, Jiann Shieh\* (2018, Sep). Growing graphene on copper nanobumps for surface enhanced Raman scattering. MNE 2018 (44th International Conference on Micro & Nano Engineering), Copenhagen, Denmark.

 

Yi Ci Tsai, Hong Yi Lee, Yi Cheng Huang, Jiann Shieh\* (2018, Sep). Improving transparency and hydrophobicity of quartz wafer via directly growing silica nanowire on the surface. MNE 2018 (44th International Conference on Micro & Nano Engineering), Copenhagen, Denmark.

 

Hong-Yi Lee, and Jiann Shieh, “Rapid, Low-Temperature Growth of Sub-10 nm Silica Nanowires from Solid Silicon Source and Plasma-Activated Platinum Thin Films”, ISPlasma 2018, March, 2018, Nagoya, Japan.

 

Hong-Yi Lee, Yi-Cheng Huang, Jiann Shieh\* “Using Plasma Activation and Platinum to Grow Carbon Nanotubes at Low Temperature”, iPlasmaNano-VIII 2017, Antwerp, Belgium. July, 2017.

 

Jiann Shieh, Cheng Yun You, Jian Ming Liu, Chia Chen Chiu, “Improving optical and electrical properties of micropillar and black-Si solar cells by combining them into a superstructure. the 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices, Kyoto. July, 2016

 

Yao Cheng Li, Chen Yan Ji, Jiann Shieh\*, “Si nanopillar solar cells decorated with plasma-made Ag nanoparticles”, Micro- and Nano-Engineering 2014, Lausanne, Switzerland.

 

Jiann Shieh\*, Chieh Yung Yeh ”Fabricating silicon nanopillars by i-ine lithography for photovoltaic application”, EMRS 2013 Spring Meeting, Strasbourg, France.

 

Chien-Chong Hong,\* Pin Huang, and Jiann Shieh, “Optical and surface properties of morphology –controlled sub-20 nm polymer nanotips/nanopores”, IEEE International Conference on Micro-Electro-Mechanical Systems 2010, Jan. 24-28, 2010, Hong Kong, China.

 

Srikanth Ravipati, Chang-Jung Kuo, Jiann Shieh,_ Fu-Hsiang Ko,_ and Cheng-Tung Chou, “Fabrication and Enhanced Field Emission Properties of Novel Silicon Nanostructures”, International Electron Devices and Materials Symposia (IEDMS2009) Nov. 19-20, Taoyuan, Taiwan. (Best Paper Award)

 

Chien-Chong Hong,\* Bin Huang, Po-Hsiang Chang, Jiann Shieh, and Tzu-Mo Yang, “Modification of a plastic into a superhydrophobic and highly transparent surface”, MicroTAS 2009 conference, Nov. 1-5, Jeju, Korea.

 

Lin CH, Fong WF, Shieh J, Ko FH, and Chang WH\*. Effects of Well-Aligned Silicon Nanograss With Comparable Surface Energy and Topography on Morphology, Growth and Cell Cycle Progression of Mouse Hepatocytes. International Conference on Nanoscience and Technology 2008, ICN&T 2008, July 20-25, 2008.

 

Lin CH\*, Shieh J, Chang WH, and Dai BT. Influence of mask magnification effects on the diffracted light and lithographic imaging for EUV phase shifting mask. Micro- and Nano-Engineering, Sep. 15-18, 2008, Athens, Greece.

 

Jiann Shieh,\* Shun Po Yang, Fu Ju Hou, Chao Chia Cheng, Bing Shian Chen, Wen Hsien Huang, “Robust Slippy Superhydrophobic Silicon Nanograss on Nanopost” Micro- and Nano-Engineering, Sep. 15-18, 2008, Athens, Greece.

 

Jiann Shieh,\* Bing Shian Chen, Fu Ju Hou, Shun Po Yang, Wen Hsien Huang, Chao Chia Cheng, “Low-reflective hydrophilic Silicon Nanograss” Micro- and Nano-Engineering (oral). Sep. 23-26, 2007, Copenhagen, Denmark.

 

Jiann Shieh\* and Ming-Che Yang, “Large-area antireflection subwavelength nanograss structure prepared by hydrogen plasma etching” E-MRS 2006 Spring Meeting. May 29-Jun. 2, Nice, France.

 

J. Shieh,\* C.C. Hsu, M.C. Yang, and T.C. Cheng, “Well-aligned Silicon Nanograss Fabricated by Hydrogen Plasma Etching without Mask and Catalyst” European Congress on Advanced Materials and Processes, Sep. 5-8, 2005, Prague, Czech Republic.

 

J. Shieh\* and M. H. Hon, “Observation of plastic deformation in TiAlCN/a-C ceramic nanocomposite coating” AVS 51st International Symposium & Exhibition, Nov. 14-19, 2004, Anaheim, CA, USA.

 

Ming-Che Yang, Jiann Shieh,\* Tsung-Shine Ko, Hsuen-Li Chen, and Tieh-Chi Chu “Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS mechanism” 2004 International Microprocesses and Nanotechnology Conference, Oct. 26-29, 2004, Osaka, Japan.

 

Wei-Hao Lai, Chien-Shuen Liao, Jiann Shieh, Lay-Gaik Teoh, I-Ming Hung, Min-Hsiung Hon, “Effect of copolymer and additive concentrations on the behaviors of mesoporous tungsten oxide” International Mesostructured Materials Symposium, 1-4 May 2004, Cape Town, South Africa.

 

L. G. Teoh, J. Shieh, W. H. Lai and M. H. Hon, “Preparation of Mesoporous WO3 Nanocrystalline Thin Films for Sensor Application” 1st International Symposium on Active Nano-Characterization and Technology, Nov. 11-Nov. 14, 2003, National Institute for Materials Science, Tsukuba, Japan.

 

Jiann Shieh and Min Hsiung Hon, “Plasma enhanced chemical vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films”, Second Asia-Pacific International Symposium on the Basis and Application of Plasma Technology, Kaohsiung, 2001.

 

J. Shieh, H.L. Wang, M. S. Tsai, and M. H. Hon, “Functionally gradient PECVD Ti(C,N) coatings”, Mat. Res. Soc. Symp. Proc. 555, 407 (1999). (EI)

 

Patents

洪健中, 黃彬, 謝健, 微結構的製作方法 (中華民國發明專利發明第I 396659號)

 

洪健中, 黃彬, 謝健, 製造具有超斥水性及高透光性之塑膠表面的方法 (中華民國發明專利發明第I 386297號)

 

Chien-Chong Hong, Pin Huang, Jiann Shieh, "Method of Manufacturing Plastic Surface with Superhydrophobicity and High Transparncy", US Patent, applied.

 

洪敏雄, 謝健, 高韌性與高附著性鈦鋁碳氮-非晶質碳奈米複合陶瓷鍍層(中華民國專利發明第178399 號)

 

Ming-Hsiung Hon, Jiann Shieh, "Superior toughness and adhesive strength ceramic coating of titanium aluminum carbon nitride-amorphous carbon nanocomposite" (US Patent US6821919 B2)

 

謝健, 柯宗憲, 陳學禮, 謝嘉民, 戴寶通, 朱鐵吉, 以金奈米粒子輔助成長半導體量子點的製作方法(中華民國專利發明第I 254380 號)

 

謝健, 柯宗憲, 陳學禮, 謝嘉民, 戴寶通, 朱鐵吉, 奈米多孔性半導體薄膜的製作方法(中華民國專利發明第I 232892 號)

 

楊閔智, 謝健, 許瓊姿, 鄭宗杰, 一種奈米線與量子點的製造方法(中華民國專利發明第I 253480 號;韓國專利10-0736401)

 

Publications in Chinese

葉介永,紀呈彥,謝健,"一維陣列抗反射矽奈米結構", 102年3月,真空科技,26期,p. 50-55.

 

洪健中,謝健,陳仕鴻,林俊宏, ”奈米結構材料與奈米生醫機電系統之發展”, 100年9 月,台灣奈米會刊,26 期,p. 38-51.

 

謝健,宋柏融,周正堂,林俊宏,” 矽奈米草輔助成長高密度奈米碳管之材料分析”,100 年8 月,電子月刊,193 期,p. 109-117.

 

謝健, 侯福居, 陳諺辰, 陳紘珉, 楊舜博, 鄭劭家, 陳學禮, “近乎完美且穩定的超疏水結構”, 99 年4 月, 科儀新知, 175 期, p. 73-79.

 

柯宗憲, 楊閔智, 謝健, 盧廷昌, 郭浩中, 王興宗, “快速熱退火對多孔鍺薄膜結構與發光性質之影響” 95 年2 月,奈米通訊,13 卷1 期,p.44-49.

 

楊閔智、謝健、許瓊姿、鄭宗杰,”以氫電漿乾式蝕刻法製作準直矽奈米草陣列” 94年8 月,奈米通訊,12 卷3 期,p.44-49.

 

謝健,”矽鍺的奈米結構:量子點、奈米線與多孔薄膜” 94 年4 月,國研科技,第6期,p.24-28.

 

楊閔智、謝健、柯宗憲,”結合氫氣乾式蝕刻及氣-固-液相成長機制製作矽的奈米線及鍺的奈米結構”, 93 年8 月,奈米通訊,11 卷3 期,p.6-11. (另轉半導體科技,第47 期,108, 2004).

 

謝健、柯宗憲、陳學禮、謝嘉民、戴寶通,”以金奈米粒子輔助高密度感應耦合電漿化學氣相沉積高密度鍺量子點於氧化矽基板之研究”,92 年8 月,奈米通訊,10 卷3 期,p.9-12.

 

謝健,“下一世代的奈米化學品”,電子月刊,第94 期,175 (2003).

 

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