Associate Professor-Wan-Yu Wu
Professor
Associate Professor Wan-Yu Wu
Personal information
Profession: Ceramic Thin Film, Thin film magnetron sputtering technology, High Power Impulse Magnetron Sputtering, Nanomaterials Fabrication, Materials Analysis
Facsimile：
Email： wywu@nuu.edu.tw
傳真機：
Education：Ph.D., Department of Materials Science and Engineering, National Cheng Kung University (2008)
Education
Ph.D., Department of Materials Science and Engineering, National Cheng Kung University (2008)
B.S., Department of Materials Science and Engineering, National Cheng Kung University (2000)
Work experience
Dean, Research and Development Office, Da-Yeh University (2020/2-2022/07)
Director, Division of Academic Research, Research and Development Office, Da-Yeh University (2015/8-2019/7)
Professor, Department of Medical Engineering, Da-Yeh University (2021/2-2022/07)
Professor, Department of Materials Science and Engineering, Da-Yeh University (2019/8-2021/1)
Associate Professor, Department of Materials and Energy Engineering, MingDao University (2015/8-2019/7)
Assistant Professor, Department of Materials Science and Engineering, MingDao University (2014/2-2015/7)
Doctoral Teacher, Department of Materials Science and Engineering, National Tainan University (2009/8-2010/7)
Post Doctor, Department of Materials Science and Engineering, National Cheng Kung University (2008/8-2009/7)
Honor and service
Director/Taiwan Association for Coating and Thin Film Technology, TACT (9th~now)
Session Chair/Symposium B/International Conference on Metallurgical Coatings and Thin Films (ICMCTF) (2022~now)
Chair/Symposium D/TACT (2017~now)
NNF Symposium Chair/Thin Films Society (2016~now)
Chair/Symposium G/ICMCTF (2019~2022)
Session Chair/Symposium G/ICMCTF (2016~2018)
Awards
Young Scholars/Taiwan Association for Coating and Thin Film Technology, TACT (2021)
Member/The Phi Tau Phi Scholastic Honor Society of the Republic of China (2008)
Research
高功率脈衝磁控濺鍍新功能性薄膜材料開發與應用－子計畫二: MXene薄膜用於析氧反應(OER)催化劑之研究/1,400,000 (MOST 111-2221-E-212-009)
以HIPIMS系統中電源和偏壓間之脈衝相差提升二元及三元鈦系與鉻系氮化物機械性質之研究/1,232,000 (MOST 110-2221-E-212-006 )
以HiPIMS技術低溫製備可撓式金屬氧化物/金屬/金屬氧化物(OMO)多層結構光電薄膜/1,332,000 (MOST 109-2221-E-212-006)
以反應式高功率脈衝磁控濺鍍技術於可撓性基材製備ZnO與AZO薄膜之研究/1,230,000 (MOST 108-2221-E-212-004)
科學工業園區人才培育補助計畫/光電半導體製程與真空技術實務/900,000
高功率脈衝磁控濺鍍技術於軟性塑膠基板之製程技術開發/1,016,000 (MOST 106-2221-E-212-005)
以表面改質之奈米碳纖維搭配微波輔助水熱合成二氧化錳製作應用於超級電容器之複合材料電極(II)/1,188,000 (MOST 105-2221-E-212-002)
Curriculum
General Physics, Diffusion Theory, Phase Transformation
Journal paper
1. Yu-Hsuan Hsu, Han-Wen Liu, Shui-Yang Lien, Wan-Yu Wu*, “High-power impulse magnetron sputter deposition for enhanced optical transmittance and electrical conductivity of flexible coating”, Thin Solid Films 748 (2022) 139158
2. Yu-Hsuan Hsu, Wan-Yu Wu, Kun-Lin Lin, Yu-Hsuan Chen, Yi-Hsin Lin, Po-Liang Liu, Ching-Lien Hsiao, and Ray-Hua Horng*, “ε‑Ga2O3 Grown on c‑Plane Sapphire by MOCVD with a Multistep Growth Process” Crystal Growth & Design 22(3) (2022) 1837-1845
3. Yung-Lin Chen, Yi-Cheng Lin*, Wan-Yu Wu, “Mo Contact via High-Power Impulse Magnetron Sputtering on Polyimide Substrate”, Coatings 12(1) (2022) 96
4. Ming-Jie Zhao, Jie Huang, Jin-Fa Zhang, Chia-Hsun Hsu, Wan-Yu Wu, Pao-Hsun Huang, Su-Fen Wei, Shui-Yang Lien*, Wen-Zhang Zhu, “Effect of oxygen flow rate ratio on crystalline phase and properties of copper oxide films prepared by room-temperature high-power impulse magnetron sputtering”, Surface and Coatings Technology 434 (2022) 128215
5. Ming-Jie Zhao, Jin-Fa Zhang, Qi-Hui Huang, Wan-Yu Wu, Ming-Chun Tseng, Shui-Yang Lien*, Wen-Zhang Zhu, “Effect of working pressure on Sn/In composition and optoelectronic properties of ITO films prepared by high power impulse magnetron sputtering”, Vacuum 196 (2022) 110762
6. Chia-Hsun Hsu, Chun-Hui Bao, Ming-Jie Zhao, Wan-Yu Wu, Shui-Yang Lien*, Wen-Zhang Zhu, “High-mobility p-type LixCuyO films prepared by plasma-enhanced atomic layer deposition and low-temperature annealing”, Materials Letters 308 (2022) 131251
7. Wan-Yu Wu, Yu-Hsuan Hsu, Yi-Fan Chen, Yuh-Renn Wu, Han-Wen Liu, Tse-Yi Tu, Paul P.-C. Chao, Chih-Shan Tan, Ray-Hua Horng*, "Wearable Devices Made of a Wireless Vertical-Type Light-Emitting Diode Package on a Flexible Polyimide Substrate with a Conductive Layer", ACS Applied Electronic Materials 3 (2021) 979 - 987.
8. Hui Li, Ying-Jie Gao, Shuo-Huang Yuan, Dong-Sing Wuu, Wan-Yu Wu*, Sam Zhang*, "Improvement in the Figure of Merit of ITO-Metal-ITO Sandwiched Films on Poly Substrate by High-Power Impulse Magnetron Sputtering", Coatings 11 (2021) 144.
9. Chao-Chun Yen, Tsun-Min Huang, Po-Wei Chen, Kai-Ping Chang, Wan-Yu Wu, and Dong-Sing Wuu*, “Role of Interfacial Oxide in the Preferred Orientation of Ga2O3 on Si for Deep Ultraviolet Photodetectors,” ACS Omega 6 (43) (2021) 29149–29156
10. Z. Chi, Fu-Gow Tarntair, M. Fregnaux, Wan-Yu Wu, C. Sartel, I. Madaci, P. Chapon, V. Sallet, Y. Dumont, A. Perez-Tomas, R.H. Horng*, "Bipolar self-doping in ultra-wide bandgap spinel ZnGa2O4", Materials Today Physics 20 (2021) 100466.
11. Z.-X. Zhang, C.-H Hsu, P.-H Huang, M.-J. Zhao, D.-C Peng, W.-Y. Wu, C.-J. Huang, W.-Z. Zhu, S.-Y. Lien, “Carbon content in PEALD-In2O3 thin films impact to its electrical and structural properties”, Optical Materials 121 (2021) 111621
12. Ka-Te Chen, Chia-Hsun Hsu, Fang-Bin Ren, Can Wang, Peng Gao, Wan-Yu Wu, Shui-Yang Lien, Wen-Zhang Zhu, “Influence of annealing temperature of nickel oxide as hole transport layer applied for inverted perovskite solar cells”, Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 39(6) (2021) 062401
13. Ming-Jie Zhao, Zhi-Xuan Zhang, Chia-Hsun Hsu, Wan-Yu Wu, Xiao-Ying Zhang, Shui-Yang Lien*, Wen-Zhang Zhu, “In2O3 film prepared by a PEALD process with balanced oxygen radical supply and ion bombardment damage”, Vacuum 192 (2021) 110411
14. Chia-Hsun Hsu, Xin-Peng Geng, Pao-Hsun Huang, Wan-Yu Wu, Ming-Jie Zhao, Xiao-Ying, Zhang, Qi-Hui Huang, Zhan-Bo Su, Zi-Rong Chen, Shui-Yang Lien *, "High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition", Journal of Alloys and Compounds 884 (2021)161025
15. Chia-Hsun Hsu, Ka-Te Chen, Ling-Yan Lin, Wan-Yu Wu, Lu-Sheng Liang, Peng Gao, Yu Qiu, Xiao-Ying Zhang, Pao-Hsun Huang, Shui-Yang Lien*, Wen-Zhang Zhu, "Tantalum-Doped TiO2 Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells ", Nanomaterials 11 (2021) 1504
16. Chia-Hsun Hsu, Xin-Peng Geng, Wan-Yu Wu, Ming-Jie Zhao, Pao-Hsun Huang, Xiao-Ying Zhang, Zhan-Bo Su, Zi-Rong Chen, Shui-Yang Lien*, "Effect of oxygen annealing temperature on properties of spatial atomic layer deposited aluminum-doped zinc oxide films", Materials Science in Semiconductor Processing 133 (2021) 105929
17. Chen Wang, Chun-Hui Bao, Wan-Yu Wu, Chia-Hsun Hsu, Ming-Jie Zhao, Shui-Yang Lien*, Wen-Zhang Zhu, "Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition", Journal of Vacuum Science & Technology A 39 (2021) 032415
18. Xiao-Ying Zhang, Yue Yang, Zhi-Xuan Zhang, Xin-Peng Geng, Chia-Hsun Hsu, Wan-Yu Wu, Shui-Yang Lien*, Wen-Zhang Zhu, "Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers", Nanomaterials 11 (2021) 1173
19. Ming-Jie Zhao, Zhi-Xuan Zhang, Chia-Hsun Hsu, Xiao-Ying Zhang, Wan-Yu Wu, Shui-Yang Lien*, Wen-Zhang Zhu, "Properties and mechanism of PEALD-In2O3 thin films prepared by different precursor reaction energy", Nanomaterials 11 (2021) 978
20. Chia-Hsun Hsu, Ka-Te Chen, Lu-Sheng Liang, Peng Gao, Sin-Liang Ou, Wan-Yu Wu, Pao-Hsun Huang, Shui-Yang Lien*, "Improved Perovskite Solar Cell Performance by High Growth Rate Spatial Atomic Layer Deposited Titanium Oxide Compact Layer ", IEEE Journal of The Electron Devices Society 9 (2021) 49 - 56
21. Ming-Jie Zhao, Zhi-Tao Sun, Wan-Yu Wu, Chia-Hsun Hsu, Xiao-Ying Zhang, Shui-YangLien*, Wen-Zhang Zhu, "Variation of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in an Oxygen-Rich Ambient", ECS Journal of Solid State Science And Technology 10 (2021) 014003
22. Pao-Hsun Huang, Zhi-Xuan Zhang, Chia-Hsun Hsu, Wan-Yu Wu, Chien-Jung Huang, Shui-Yang Lien*, "Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition", Materials 14 (2021) 690
23. Shu-Chuan Liao, Chih-Ying Chen, Yu-Hsuan Hsu, Chi-Ting Li, Cheng-Chi Hsieh, Ming-Shiun Tsai, Man-Yee Chan, Cheng-Hung Lee, Sue-Hong Wang, Shang-Kok Ng, Hsi-Kai Tsou, Wan-Yu Wu*, ”In Vitro and In Vivo Biocompatibility Study of Surface Modified TiN Deposited on Ti6Al4V using High-Power Impulse Magnetron Sputtering Technique,” Surface & Coatings Technology 394 (2020) 125814.
24. Chia-Hsun Hsu, Zhi-Xuan Zhang, Pao-Hsun Huang, Wan-Yu Wu, Sin-Liang Ou, Shui-Yang, Lien*, Chien-Jung Huang, Ming-Kwei Lee, Wen-Zhang Zhu, "Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition ", Ceramics International 47 (2020) 8634 - 8641.
25. Chia-Hsun Hsu, Xin-Peng Geng, Wan-Yu Wu, Ming-Jie Zhao, Xiao-Ying Zhang, Pao-Hsun Huang and Shui-Yang Lien, ” Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition,” Molecules 25 (2020) 5043.
26. Chia-Hsun Hsu, Ka-Te Chen, Pao-Hsun Huang, Wan-Yu Wu, Xiao-Ying Zhang, Chen Wang, Lu-Sheng Liang, Peng Gao, Yu Qiu, Shui-Yang Lien, Zhan-Bo Su, Zi-Rong Chen, Wen-Zhang Zhu, ”Effect of Annealing Temperature on Spatial Atomic Layer Deposited Titanium Oxide and Its Application in Perovskite Solar Cells,” Nanomaterials 10 (2020) 1322.
27. Chia-Hsun Hsu, Shih-Mao Liu, Wan-Yu Wu, Yun-Shao Cho, Pao-Hsun Huang, Chien-Jung Huang, Shui-Yang Lien, Wen-Zhang Zhu, ”Nanostructured pyramidal black silicon with ultra-low reflectance and high passivation,” Arabian Journal of Chemistry Arabian Journal of Chemistry 13 (2020) 8239–8247.
28. Ming-Jie Zhao, Zhi-Tao Sun, Chia-Hsun Hsu, Pao-Hsun Huang, Xiao-Ying Zhang, Wan-Yu Wu, Peng Gao, Yu Qiu, Shui-Yang Lien, Wen-Zhang Zhu, ”Zinc Oxide Films with High Transparency and Crystallinity Prepared by a Low Temperature Spatial Atomic Layer Deposition Process,” Nanomaterials 10 (2020) 459.
29. Ming-Jie Zhao, Zhi-Tao Sun, Zhi-Xuan Zhang, Xin-Peng Geng, Wan-Yu Wu, Shui-Yang Lien, Wen-Zhang Zhu,” Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions,” Materials 13 (2020) 3910.
30. Yu-Hsuan Hsu, Wan-Yu Wu*, ”Antibacterial Ag-Cu Coatings Deposited Using an Asymmetric Bipolar High Power Impulse Magnetron Sputtering Technique”, Surface & Coatings Technology 362 (2019) p.302-310.
31. Wan-Yu Wu*, Man-Yee Chan, Yu-Hsuan Hsu, Guan-Zhen Chen, Shu-Chuan Liao, Cheng-Hung Lee, Ping-Wing Lui, “Bioapplication of TiN Thin Films Deposited Using High Power Impulse Magnetron Sputtering”, Surface & Coatings Technology 362 (2019) p.167-175.
32. Hsin-Yu Wu, Chia-Hsun Hsu, Ting-Xuan Liu, Yu-Chih Ou, Yu-Hsuan Hsu, Wan-Yu Wu, Shui-Yang Lien*, Yeu-Long Jian, "Silicon nitride cover layer prepared by silane-free plasma chemical vapor deposition for high quality surface passivation of silicon solar cells," Surface & Coatings Technology 376 (2019) 68-73.
33. Chia-Hsun Hsu, Yun-Shao Cho, Wan-Yu Wu, Shui-Yang Lien*, Xiao-Ying Zhang, Wen-Zhang Zhu, Sam Zhang and Song-Yan Chen,” Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealing”, Nanoscale Research Letters 14:139 (2019)
34. Xiao-Ying Zhang, Chia-Hsun Hsu, Shui-Yang Lien*, Wan-Yu Wu, Sin-Liang Ou, Song-Yan Chen, Wei Huang, Wen-Zhang Zhu, Fei-Bing Xiong and Sam Zhang, ”Temperature-Dependent HfO2/Si Interface Structural Evolution and its Mechanism”, Nanoscale Research Letters 14:83 (2019)
35. Chia-Hsun Hsu, Yang-Shih Lin, Hsin-Yu Wu, Xiao-Ying Zhang, Wan-Yu Wu, Shui-Yang Lien, Dong-Sing Wuu, Yeu-Long Jiang, ”Deposition of Silicon-Based Stacked Layers for Flexible Encapsulation of Organic Light Emitting Diodes”, Nanomaterials 9 (2019) 1053.
36. Yun-Shao Cho, Chia-Hsun Hsu, Kuo-Yao Shen, Sam Zhang, Wan-Yu Wu, Shui-Yang Lien*, ”Mechanism of dense silicon dioxide films deposited under 100 oC via inductively coupled plasma chemical vapor deposition”, Surface & Coatings Technology 359 (2019) pp.247-251.
37. Chia-Hsun Hsu, Chun-Wei Huang, Yun-Shao Cho, Wan-Yu Wu, Dong-Sing Wuu, Xiao-Ying Zhang, Wen-Zhang Zhu, Shui-Yang Lien*, Chang-Sin Ye, ”Efficiency improvement of PERC solar cell using an aluminum oxide passivation layer prepared via spatial atomic layer deposition and post-annealing”, Surface & Coatings Technology 358 (2019) pp.968-975.
38. Yun-Shao Cho, Li-Kai Liao, Chia-Hsun Hsu, Yu-Hsuan Hsu, Wan-Yu Wu, Shu-Chuan Liao, Kun Hui Chen, Ping-Wing Lui, Sam Zhang, Shui-Yang Lien*, "Effect of substrate bias on biocompatibility of amorphous carbon coatings deposited on Ti6Al4V by PECVD," Surface & Coatings Technology 357 (2019) 212-217.
Conference Paper
1. 林英翔，吳建一，吳宛玉*, “同步脈衝偏壓對高功率脈磁控濺鍍製程中電漿組成影響之研究”，台灣真空學會，2020年11月13日，中原大學
2. 林英翔，吳宛玉*, ”同步脈衝偏壓對高功率脈衝磁控濺鍍沉積Ti薄膜之影響”, 2020中國材料科學學會， 2020年11月6、7日，明志科技大學
3. 高英傑，宋皇輝，吳宛玉*, “於可撓基材上沉積透明導電銦錫氧化物與銀金屬多層結構之研究”, TACT 2020 台灣鍍膜科技協會年會，2020年10月23、24日，國立中興大學
4. 林仕昕、江榮隆、武東星、宋皇輝、吳宛玉*, “高功率脈衝磁控濺射技術沉積氧化鎵多層Ga2O3/Ag-Cu/Ga2O3結構之研究”, TACT 2020 台灣鍍膜科技協會年會，2020年10月23、24日，國立中興大學
5. 蕭育凱，吳宛玉*， “高功率脈衝磁控濺鍍銦錫氧化物薄膜之研究”, TACT 2020 台灣鍍膜科技協會年會，2020年10月23、24日，國立中興大學
6. 林英翔，吳建一，吳宛玉*, “同步脈衝偏壓對高功率脈衝磁控濺鍍沉積TiN薄膜之影響” , TACT 2020 台灣鍍膜科技協會年會，2020年10月23、24日，國立中興大學
7. Yu-Hsuan Hsu, Wan-Yu Wu, “Exploring the Transparent Conducting Property of ZnO and AZO Coatings Prepared Using HiPIMS Deposition”, 台灣真空學會暨論文發表會，2019年11月01日，國立交通大學
8. Ying-Xiang Lin, Wan-Yu Wu, Man-Yee Chan, Yu-Hsuan Hsu, Guan-Zhen Chen, Shu-Chuan Liao, Cheng-Hung Lee, Ping-Wing Lui, “Bioapplication of TiN Thin Films Deposited Using High Power Impulse Magnetron Sputtering”, 台灣真空學會暨論文發表會，2019年11月01日，國立交通大學
9. Yu-Hsuan Hsu, Wan-Yu Wu, “Exploring the transparent conducting property of ZnO-based multilayer coatings prepared using HiPIMS deposition”, TACT 2019 conference, Taiwan, 2019/10/17-20, National Taipei University of Technology
10. Chia-Hsun Hsu, Shih-Mao Liu, Wan-Yu Wu, Shui-Yang Lien, “Nanotexturization and passivation of single crystalline silicon surface for passivated emitter and rear contact solar cells,” ICMCTF 2019, 美國/加州/聖地牙哥, USA 2019/5